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AMTECH SYSTEMS INC (ASYS)
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Filings
Date Filed
Type
Description
01/20/2023
DEF 14A
Form DEF 14A - Other definitive proxy statements:
01/18/2022
DEF 14A
Form DEF 14A - Other definitive proxy statements:
01/28/2021
DEF 14A
Form DEF 14A - Other definitive proxy statements:
01/24/2020
DEF 14A
Form DEF 14A - Other definitive proxy statements:
01/25/2019
DEF 14A
Form DEF 14A - Other definitive proxy statements:
04/05/2018
DEF 14A
Form DEF 14A - Other definitive proxy statements:
01/27/2017
DEF 14A
Form DEF 14A - Other definitive proxy statements:
03/03/2016
DEFR14A
Form DEFR14A - Revised definitive proxy soliciting materials
01/25/2016
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/11/2015
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/16/2015
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
12/23/2014
DEFM14A
Form DEFM14A - Definitive proxy statement relating to merger or acquisition
03/28/2014
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/23/2013
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/23/2012
DEF 14A
Form DEF 14A - Other definitive proxy statements
12/21/2010
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/28/2010
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/28/2009
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/28/2008
DEF 14A
Form DEF 14A - Other definitive proxy statements
04/23/2007
DEF 14A
Form DEF 14A - Other definitive proxy statements
02/13/2006
DEF 14A
Form DEF 14A - Other definitive proxy statements
06/15/2005
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/28/2004
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/24/2003
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/28/2002
DEF 14A
Form DEF 14A - Other definitive proxy statements
02/20/2001
DEF 14A
Form DEF 14A - Other definitive proxy statements
02/10/2000
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/28/1999
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/29/1998
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/30/1997
DEF 14A
Form DEF 14A - Other definitive proxy statements
01/29/1996
DEF 14A
Form DEF 14A - Other definitive proxy statements
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