AMTECH SYSTEMS INC (ASYS) [Rocket]

Ownership

AMTECH SYSTEMS INC (ASYS)

Portfolio as of:

Name	Shares	Change	Value	% Port	% OS	Hist	Date
ROYCE & ASSOCIATES LP	1,404,019	-11,918	13,422,422,000	0.13	10.00	Hist	06/30/2023
DIMENSIONAL FUND ADVISORS LP	1,140,336	-16,046	10,900,773,000	0.00	8.12	Hist	06/30/2023
Pacific Ridge Capital Partners, LLC	809,170	41,014	7,735,665,000	1.76	5.76	Hist	06/30/2023
VANGUARD GROUP INC	622,412	151,032	5,950,259,000	0.00	4.43	Hist	06/30/2023
First Eagle Investment Management, LLC	413,079	74,868	3,949,035,000	0.01	2.94	Hist	06/30/2023
ESSEX INVESTMENT MANAGEMENT CO LLC	354,500	42,682	3,389,020,000	0.47	2.52	Hist	06/30/2023
SELDON CAPITAL LP	252,824	-65,824	2,416,997,000	2.25	1.80	Hist	06/30/2023
KENNEDY CAPITAL MANAGEMENT, INC.	215,410	215,410	2,059,320,000	0.05	1.53	Hist	06/30/2023
BlackRock Inc.	143,988	5,177	1,376,525,000	0.00	1.03	Hist	06/30/2023
Legato Capital Management LLC	136,132	35,678	1,301,422,000	0.18	0.97	Hist	06/30/2023
Brandywine Global Investment Management, LLC	124,338	-500	1,188,671,000	0.01	0.89	Hist	06/30/2023
OBERWEIS ASSET MANAGEMENT INC/	118,900	0	1,136,684,000	0.14	0.85	Hist	06/30/2023
GEODE CAPITAL MANAGEMENT, LLC	109,945	1,466	1,051,074,000	0.00	0.78	Hist	06/30/2023
Ancora Advisors, LLC	72,282	0	691,016,000	0.02	0.51	Hist	06/30/2023
BRIDGEWAY CAPITAL MANAGEMENT, LLC	69,600	0	665,376,000	0.02	0.50	Hist	06/30/2023
WealthTrust Axiom LLC	45,456	4,803	434,559,000	0.14	0.32	Hist	06/30/2023
STATE STREET CORP	39,590	2,600	378,480,000	0.00	0.28	Hist	06/30/2023
CITADEL ADVISORS LLC	37,194	9,677	355,575,000	0.00	0.26	Hist	06/30/2023
O'SHAUGHNESSY ASSET MANAGEMENT, LLC	34,197	11,007	326,923,000	0.00	0.24	Hist	06/30/2023
Connor, Clark & Lunn Investment Management Ltd.	33,306	13,370	318,405,000	0.00	0.24	Hist	06/30/2023
IRONWOOD INVESTMENT MANAGEMENT LLC	29,511	-907	282,125,000	0.16	0.21	Hist	06/30/2023
NORTHERN TRUST CORP	22,287	309	213,064,000	0.00	0.16	Hist	06/30/2023
WHITE PINE CAPITAL LLC	19,728	4,459	188,600,000	0.07	0.14	Hist	06/30/2023
TWO SIGMA ADVISERS, LP	15,300	-11,000	146,268,000	0.00	0.11	Hist	06/30/2023
ROYAL BANK OF CANADA	12,511	3,911	120,000,000	0.00	0.09	Hist	06/30/2023
Keebeck Wealth Management, LLC	10,000	10,000	95,600,000	0.01	0.07	Hist	06/30/2023
Firsthand Capital Management, Inc.	6,600	6,600	63,096,000	0.08	0.05	Hist	06/30/2023
MORGAN STANLEY	3,463	3,349	33,106,000	0.00	0.02	Hist	06/30/2023
UBS Group AG	2,003	0	19,149,000	0.00	0.01	Hist	06/30/2023
KOKINO LLC	2,250,000	0	19,125,000	68.41	16.20	Hist	09/30/2022
EARNEST PARTNERS LLC	1,700	0	16,252,000	0.00	0.01	Hist	06/30/2023
Tower Research Capital LLC (TRC)	538	-4,409	5,143,000	0.00	0.00	Hist	06/30/2023
RHUMBLINE ADVISERS	492	492	4,703,000	0.00	0.00	Hist	06/30/2023
NewEdge Advisors, LLC	135	-148	1,290,000	0.00	0.00	Hist	06/30/2023
ADVISOR GROUP HOLDINGS, INC.	113	-1	1,080,000			Hist	06/30/2023
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