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| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 01/27/2011 | AMTECH SYSTEMS INC | ASYS | 438,250 | -116,290 | 11,723,188 | 2,185,100 | $26.75 |
| 09/23/2010 | AMTECH SYSTEMS INC | ASYS | 554,540 | -139,341 | 9,538,088 | -1,411,354 | $17.20 |
| 09/02/2010 | AMTECH SYSTEMS INC | ASYS | 693,881 | -138,519 | 10,949,442 | 8,227,494 | $15.78 |
| 02/17/2009 | AMTECH SYSTEMS INC | ASYS | 832,400 | 832,400 | 2,721,948 | 2,721,948 | $3.27 |
| 09/26/2008 | AMTECH SYSTEMS INC | ASYS | 733,464 | 733,464 | 7,451,994 | 7,451,994 | $10.16 |
| 07/18/2008 | AMTECH SYSTEMS INC | ASYS | 634,590 | 634,590 | 5,958,800 | 5,958,800 | $9.39 |
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