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NORTHERN TRUST CORP
> ACLS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 384,782 | 6,083 | 70,542,084,000 | 20,080,442,000 | $183,330.00 |
| 03/31/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 378,699 | 9,465 | 50,461,642,000 | 50,439,281,000 | $133,250.00 |
| 09/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 369,234 | -229 | 22,361,000 | 2,100,000 | $60.56 |
| 06/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 369,463 | -11,319 | 20,261,000 | -8,499,000 | $54.84 |
| 03/31/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 380,782 | -19,447 | 28,760,000 | -1,080,000 | $75.53 |
| 12/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 400,229 | -1,977 | 29,840,000 | 10,924,000 | $74.56 |
| 09/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 402,206 | -14,999 | 18,916,000 | 2,053,000 | $47.03 |
| 06/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 417,205 | -9,443 | 16,863,000 | -669,000 | $40.42 |
| 03/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 426,648 | -24,806 | 17,532,000 | 4,385,000 | $41.09 |
| 12/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 451,454 | -21,394 | 13,147,000 | 2,744,000 | $29.12 |
| 09/30/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 472,848 | 30,377 | 10,403,000 | 2,301,000 | $22.00 |
| 03/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 442,471 | 470 | 8,102,000 | -2,548,000 | $18.31 |
| 12/31/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 442,001 | -1,947 | 10,650,000 | 3,063,000 | $24.09 |
| 09/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 443,948 | 31,741 | 7,587,000 | 1,384,000 | $17.09 |
| 06/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 412,207 | 8,605 | 6,203,000 | -1,918,000 | $15.05 |
| 03/31/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 403,602 | 7,601 | 8,121,000 | 1,072,000 | $20.12 |
| 12/31/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 396,001 | 1,144 | 7,049,000 | -710,000 | $17.80 |
| 09/30/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 394,857 | 8,255 | 7,759,000 | 105,000 | $19.65 |
| 06/30/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 386,602 | 1,199 | 7,654,000 | -1,827,000 | $19.80 |
| 03/31/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 385,403 | 7,081 | 9,481,000 | -1,377,000 | $24.60 |
| 12/31/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 378,322 | 5,231 | 10,858,000 | 654,000 | $28.70 |
| 09/30/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 373,091 | 4,116 | 10,204,000 | 2,474,000 | $27.35 |
| 06/30/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 368,975 | 59,623 | 7,730,000 | 1,915,000 | $20.95 |
| 03/31/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 309,352 | 309,352 | 5,815,000 | 5,815,000 | $18.80 |
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