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WELLINGTON MANAGEMENT GROUP LLP
> ACLS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 630,075 | -277,415 | 115,511,650,000 | -5,411,392,000 | $183,330.00 |
| 03/31/2023 | AXCELIS TECHNOLOGIES INC | ACLS | 907,490 | -121,889 | 120,923,042,000 | 120,860,703,000 | $133,250.00 |
| 09/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 1,029,379 | 93,570 | 62,339,000 | 11,020,000 | $60.56 |
| 06/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 935,809 | -188,746 | 51,319,000 | -33,619,000 | $54.84 |
| 03/31/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 1,124,555 | -105,858 | 84,938,000 | -6,801,000 | $75.53 |
| 12/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 1,230,413 | 12,151 | 91,739,000 | 34,444,000 | $74.56 |
| 09/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 1,218,262 | -31,175 | 57,295,000 | 6,793,000 | $47.03 |
| 06/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 1,249,437 | -218,761 | 50,502,000 | -9,826,000 | $40.42 |
| 03/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 1,468,198 | -141,166 | 60,328,000 | 13,464,000 | $41.09 |
| 12/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 1,609,364 | -77,873 | 46,864,000 | 9,745,000 | $29.12 |
| 09/30/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 1,687,237 | -279,462 | 37,119,000 | -17,653,000 | $22.00 |
| 06/30/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 1,966,699 | -421,092 | 54,772,000 | 11,052,000 | $27.85 |
| 03/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 2,387,791 | 569,734 | 43,720,000 | -85,000 | $18.31 |
| 12/31/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 1,818,057 | 96,225 | 43,805,000 | 14,379,000 | $24.09 |
| 09/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 1,721,832 | -480,719 | 29,426,000 | -3,722,000 | $17.09 |
| 06/30/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 2,202,551 | -360,193 | 33,148,000 | -18,415,000 | $15.05 |
| 03/31/2019 | AXCELIS TECHNOLOGIES INC | ACLS | 2,562,744 | -96,001 | 51,563,000 | 4,237,000 | $20.12 |
| 12/31/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 2,658,745 | 484,030 | 47,326,000 | 4,593,000 | $17.80 |
| 09/30/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 2,174,715 | -87,007 | 42,733,000 | -2,050,000 | $19.65 |
| 06/30/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 2,261,722 | -1,139,471 | 44,783,000 | -38,885,000 | $19.80 |
| 06/29/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 2,261,722 | -1,139,471 | 44,782,096 | -38,885,904 | $19.80 |
| 03/31/2018 | AXCELIS TECHNOLOGIES INC | ACLS | 3,401,193 | -631,041 | 83,668,000 | -32,058,000 | $24.60 |
| 12/31/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 4,032,234 | 3,443,481 | 115,726,000 | 99,624,000 | $28.70 |
| 12/29/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 4,032,234 | 3,443,481 | 115,725,116 | 99,623,116 | $28.70 |
| 09/30/2017 | AXCELIS TECHNOLOGIES INC | ACLS | 588,753 | 588,753 | 16,102,000 | 16,102,000 | $27.35 |
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