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CITADEL ADVISORS LLC
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 37,194 | 9,677 | 355,575,000 | 146,446,000 | $9,560.01 |
| 12/31/2022 | AMTECH SYSTEMS INC | ASYS | 27,517 | 7,794 | 209,129,000 | 208,961,000 | $7,599.99 |
| 09/30/2022 | AMTECH SYSTEMS INC | ASYS | 19,723 | 19,723 | 168,000 | 168,000 | $8.52 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 0 | -19,460 | 0 | -222,000 | |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 19,460 | 19,460 | 222,000 | 222,000 | $11.41 |
| 06/30/2021 | AMTECH SYSTEMS INC | ASYS | 0 | -21,913 | 0 | -259,000 | |
| 03/31/2021 | AMTECH SYSTEMS INC | ASYS | 21,913 | 21,913 | 259,000 | 259,000 | $11.82 |
| 09/30/2020 | AMTECH SYSTEMS INC | ASYS | 0 | -10,172 | 0 | -50,000 | |
| 06/30/2020 | AMTECH SYSTEMS INC | ASYS | 10,172 | 10,172 | 50,000 | 50,000 | $4.92 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 0 | -18,350 | 0 | -98,000 | |
| 03/31/2019 | AMTECH SYSTEMS INC | ASYS | 18,350 | -938 | 98,000 | 11,000 | $5.34 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 19,288 | 3,905 | 87,000 | 5,000 | $4.51 |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 15,383 | -10,758 | 82,000 | -76,000 | $5.33 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 26,141 | -26,250 | 158,000 | -225,000 | $6.04 |
| 03/31/2018 | AMTECH SYSTEMS INC | ASYS | 52,391 | 3,917 | 383,000 | -105,000 | $7.31 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 48,474 | 31,331 | 488,000 | 283,000 | $10.07 |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 17,143 | 17,143 | 205,000 | 205,000 | $11.96 |
| 06/30/2013 | AMTECH SYSTEMS INC | ASYS | 0 | -8,484 | 0 | -27,000 | |
| 03/31/2013 | AMTECH SYSTEMS INC | ASYS | 0 | -8,484 | 0 | -27,000 | |
| 12/31/2012 | AMTECH SYSTEMS INC | ASYS | 8,484 | 8,484 | 27,000 | 27,000 | $3.18 |
| 09/30/2012 | AMTECH SYSTEMS INC | ASYS | 0 | -2,190 | 0 | -18,000 | |
| 06/30/2012 | AMTECH SYSTEMS INC | ASYS | 0 | -2,190 | 0 | -18,000 | |
| 03/31/2012 | AMTECH SYSTEMS INC | ASYS | 2,190 | 2,190 | 18,000 | 18,000 | $8.22 |
| 12/31/2011 | AMTECH SYSTEMS INC | ASYS | 295 | 295 | 3,000 | 3,000 | $10.17 |
| 09/30/2011 | AMTECH SYSTEMS INC | ASYS | 0 | -8,033 | 0 | -166,000 | |
| 06/30/2011 | AMTECH SYSTEMS INC | ASYS | 0 | -17,280 | 0 | -436,000 | |
| 03/31/2011 | AMTECH SYSTEMS INC | ASYS | 17,280 | 17,280 | 436,000 | 436,000 | $25.23 |
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