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ROYAL BANK OF CANADA
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 12,511 | 3,911 | 120,000,000 | 55,000,000 | $9,591.56 |
| 12/31/2022 | AMTECH SYSTEMS INC | ASYS | 8,600 | 8,600 | 65,000,000 | 65,000,000 | $7,558.14 |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 0 | -288 | 0 | -3,000 | |
| 03/31/2021 | AMTECH SYSTEMS INC | ASYS | 288 | 106 | 3,000 | 2,000 | $10.42 |
| 12/31/2020 | AMTECH SYSTEMS INC | ASYS | 182 | 52 | 1,000 | 0 | $5.49 |
| 09/30/2020 | AMTECH SYSTEMS INC | ASYS | 130 | -236 | 1,000 | -1,000 | $7.69 |
| 06/30/2020 | AMTECH SYSTEMS INC | ASYS | 366 | -1,804 | 2,000 | -8,000 | $5.46 |
| 03/31/2020 | AMTECH SYSTEMS INC | ASYS | 2,170 | 170 | 10,000 | -4,000 | $4.61 |
| 12/31/2019 | AMTECH SYSTEMS INC | ASYS | 2,000 | 1,000 | 14,000 | 9,000 | $7.00 |
| 09/30/2019 | AMTECH SYSTEMS INC | ASYS | 1,000 | 0 | 5,000 | -1,000 | $5.00 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 1,000 | 0 | 6,000 | 1,000 | $6.00 |
| 03/31/2019 | AMTECH SYSTEMS INC | ASYS | 1,000 | 0 | 5,000 | 0 | $5.00 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 1,000 | -120 | 5,000 | -1,000 | $5.00 |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 1,120 | -980 | 6,000 | -7,000 | $5.36 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 2,100 | -46 | 13,000 | -3,000 | $6.19 |
| 03/31/2018 | AMTECH SYSTEMS INC | ASYS | 2,146 | 407 | 16,000 | -2,000 | $7.46 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 1,739 | -6,678 | 18,000 | -83,000 | $10.35 |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 8,417 | 8,317 | 101,000 | 100,000 | $12.00 |
| 06/30/2017 | AMTECH SYSTEMS INC | ASYS | 100 | -400 | 1,000 | -2,000 | $10.00 |
| 03/31/2017 | AMTECH SYSTEMS INC | ASYS | 500 | 0 | 3,000 | 1,000 | $6.00 |
| 12/31/2016 | AMTECH SYSTEMS INC | ASYS | 500 | 0 | 2,000 | 0 | $4.00 |
| 09/30/2016 | AMTECH SYSTEMS INC | ASYS | 500 | 500 | 2,000 | 2,000 | $4.00 |
| 06/30/2016 | AMTECH SYSTEMS INC | ASYS | 500 | 500 | 3,000 | 3,000 | $6.00 |
| 03/31/2016 | AMTECH SYSTEMS INC | ASYS | 500 | 0 | 3,000 | 0 | $6.00 |
| 12/31/2015 | AMTECH SYSTEMS INC | ASYS | 500 | 500 | 3,000 | 3,000 | $6.00 |
| 09/30/2015 | AMTECH SYSTEMS INC | ASYS | 500 | 500 | 2,000 | 2,000 | $4.00 |
| 12/31/2013 | AMTECH SYSTEMS INC | ASYS | 0 | -12 | 0 | -88 | |
| 09/30/2013 | AMTECH SYSTEMS INC | ASYS | 12 | 12 | 88 | 88 | $7.30 |
| 06/30/2013 | AMTECH SYSTEMS INC | ASYS | 0 | -1,000 | 0 | -4,000 | |
| 03/31/2013 | AMTECH SYSTEMS INC | ASYS | 1,000 | 1,000 | 4,000 | 4,000 | $4.00 |
| 03/31/2012 | AMTECH SYSTEMS INC | ASYS | 0 | -786 | 0 | -7,000 | |
| 12/31/2011 | AMTECH SYSTEMS INC | ASYS | 786 | -13,647 | 7,000 | -108,000 | $8.91 |
| 09/30/2011 | AMTECH SYSTEMS INC | ASYS | 14,433 | -7,507 | 115,000 | -338,000 | $7.97 |
| 06/30/2011 | AMTECH SYSTEMS INC | ASYS | 21,940 | 1,542 | 453,000 | -62,000 | $20.65 |
| 03/31/2011 | AMTECH SYSTEMS INC | ASYS | 20,398 | 12,676 | 515,000 | 321,000 | $25.25 |
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