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NORTHERN TRUST CORP
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 22,287 | 309 | 213,064,000 | 3,394,000 | $9,560.01 |
| 03/31/2023 | AMTECH SYSTEMS INC | ASYS | 21,978 | -2,178 | 209,670,000 | 209,465,000 | $9,539.99 |
| 09/30/2022 | AMTECH SYSTEMS INC | ASYS | 24,156 | 255 | 205,000 | 31,000 | $8.49 |
| 06/30/2022 | AMTECH SYSTEMS INC | ASYS | 23,901 | -365 | 174,000 | -71,000 | $7.28 |
| 03/31/2022 | AMTECH SYSTEMS INC | ASYS | 24,266 | -2,580 | 245,000 | -21,000 | $10.10 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 26,846 | -429 | 266,000 | -46,000 | $9.91 |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 27,275 | -1,812 | 312,000 | 31,000 | $11.44 |
| 06/30/2021 | AMTECH SYSTEMS INC | ASYS | 29,087 | -2,033 | 281,000 | -87,000 | $9.66 |
| 03/31/2021 | AMTECH SYSTEMS INC | ASYS | 31,120 | 559 | 368,000 | 173,000 | $11.83 |
| 12/31/2020 | AMTECH SYSTEMS INC | ASYS | 30,561 | -848 | 195,000 | 41,000 | $6.38 |
| 09/30/2020 | AMTECH SYSTEMS INC | ASYS | 31,409 | 292 | 154,000 | 3,000 | $4.90 |
| 06/30/2020 | AMTECH SYSTEMS INC | ASYS | 31,117 | -3,006 | 151,000 | 3,000 | $4.85 |
| 03/31/2020 | AMTECH SYSTEMS INC | ASYS | 34,123 | 5,823 | 148,000 | -55,000 | $4.34 |
| 12/31/2019 | AMTECH SYSTEMS INC | ASYS | 28,300 | -260 | 203,000 | 52,000 | $7.17 |
| 09/30/2019 | AMTECH SYSTEMS INC | ASYS | 28,560 | -300 | 151,000 | -8,000 | $5.29 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 28,860 | -921 | 159,000 | 0 | $5.51 |
| 03/31/2019 | AMTECH SYSTEMS INC | ASYS | 29,781 | -920 | 159,000 | 20,000 | $5.34 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 30,701 | -1,000 | 139,000 | -31,000 | $4.53 |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 31,701 | 0 | 170,000 | -21,000 | $5.36 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 31,701 | 0 | 191,000 | -41,000 | $6.03 |
| 03/31/2018 | AMTECH SYSTEMS INC | ASYS | 31,701 | 388 | 232,000 | -84,000 | $7.32 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 31,313 | 5,296 | 316,000 | 4,000 | $10.09 |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 26,017 | 4,220 | 312,000 | 128,000 | $11.99 |
| 06/30/2017 | AMTECH SYSTEMS INC | ASYS | 21,797 | 242 | 184,000 | 65,000 | $8.44 |
| 03/31/2017 | AMTECH SYSTEMS INC | ASYS | 21,555 | 21,555 | 119,000 | 119,000 | $5.52 |
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