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BlackRock Inc.
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 143,988 | 5,177 | 1,376,525,000 | 52,269,000 | $9,560.00 |
| 03/31/2023 | AMTECH SYSTEMS INC | ASYS | 138,811 | -104 | 1,324,256,000 | 1,323,075,000 | $9,539.99 |
| 09/30/2022 | AMTECH SYSTEMS INC | ASYS | 138,915 | -788 | 1,181,000 | 161,000 | $8.50 |
| 06/30/2022 | AMTECH SYSTEMS INC | ASYS | 139,703 | -1,659 | 1,020,000 | -402,000 | $7.30 |
| 03/31/2022 | AMTECH SYSTEMS INC | ASYS | 141,362 | -3,799 | 1,422,000 | -12,000 | $10.06 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 145,161 | 2,735 | 1,434,000 | -195,000 | $9.88 |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 142,426 | -1,805 | 1,629,000 | 238,000 | $11.44 |
| 06/30/2021 | AMTECH SYSTEMS INC | ASYS | 144,231 | -22,133 | 1,391,000 | -576,000 | $9.64 |
| 03/31/2021 | AMTECH SYSTEMS INC | ASYS | 166,364 | 1,858 | 1,967,000 | 917,000 | $11.82 |
| 12/31/2020 | AMTECH SYSTEMS INC | ASYS | 164,506 | 1,783 | 1,050,000 | 254,000 | $6.38 |
| 09/30/2020 | AMTECH SYSTEMS INC | ASYS | 162,723 | -761 | 796,000 | 0 | $4.89 |
| 06/30/2020 | AMTECH SYSTEMS INC | ASYS | 163,484 | 1,590 | 796,000 | 92,000 | $4.87 |
| 03/31/2020 | AMTECH SYSTEMS INC | ASYS | 161,894 | 685 | 704,000 | -450,000 | $4.35 |
| 12/31/2019 | AMTECH SYSTEMS INC | ASYS | 161,209 | 24,521 | 1,154,000 | 430,000 | $7.16 |
| 09/30/2019 | AMTECH SYSTEMS INC | ASYS | 136,688 | 40 | 724,000 | 723,248 | $5.30 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 136,648 | 10,122 | 752 | -673,248 | $0.01 |
| 03/31/2019 | AMTECH SYSTEMS INC | ASYS | 126,526 | -29,399 | 674,000 | -32,000 | $5.33 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 155,925 | 934 | 706,000 | -122,000 | $4.53 |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 154,991 | 1,534 | 828,000 | -101,000 | $5.34 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 153,457 | 99,807 | 929,000 | 536,000 | $6.05 |
| 03/31/2018 | AMTECH SYSTEMS INC | ASYS | 53,650 | 3,656 | 393,000 | -111,000 | $7.33 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 49,994 | 893 | 504,000 | -84,000 | $10.08 |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 49,101 | -453 | 588,000 | 170,000 | $11.98 |
| 06/30/2017 | AMTECH SYSTEMS INC | ASYS | 49,554 | 2,063 | 418,000 | 156,000 | $8.44 |
| 03/31/2017 | AMTECH SYSTEMS INC | ASYS | 47,491 | 47,491 | 262,000 | 262,000 | $5.52 |
| 06/30/2012 | AMTECH SYSTEMS INC | ASYS | 0 | -357 | 0 | -3,000 | |
| 03/31/2012 | AMTECH SYSTEMS INC | ASYS | 357 | 0 | 3,000 | 0 | $8.40 |
| 12/31/2011 | AMTECH SYSTEMS INC | ASYS | 357 | 0 | 3,000 | 0 | $8.40 |
| 09/30/2011 | AMTECH SYSTEMS INC | ASYS | 357 | 0 | 3,000 | -4,000 | $8.40 |
| 06/30/2011 | AMTECH SYSTEMS INC | ASYS | 357 | 357 | 7,000 | 7,000 | $19.61 |
| 06/29/2006 | AMTECH SYSTEMS INC | ASYS | 0 | -100 | 0 | -1,000 | |
| 03/30/2006 | AMTECH SYSTEMS INC | ASYS | 100 | 100 | 1,000 | 1,000 | $10.00 |
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