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ROYCE & ASSOCIATES LP
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 1,404,019 | -11,918 | 13,422,422,000 | -85,617,000 | $9,560.00 |
| 03/31/2023 | AMTECH SYSTEMS INC | ASYS | 1,415,937 | 69,929 | 13,508,039,000 | 13,498,213,000 | $9,540.00 |
| 06/30/2022 | AMTECH SYSTEMS INC | ASYS | 1,346,008 | 57,757 | 9,826,000 | -3,134,000 | $7.30 |
| 03/31/2022 | AMTECH SYSTEMS INC | ASYS | 1,288,251 | 84,391 | 12,960,000 | 1,066,000 | $10.06 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 1,203,860 | 387,739 | 11,894,000 | 2,566,000 | $9.88 |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 816,121 | 210,455 | 9,328,000 | 3,489,000 | $11.43 |
| 06/30/2021 | AMTECH SYSTEMS INC | ASYS | 605,666 | 78,000 | 5,839,000 | -398,000 | $9.64 |
| 03/31/2021 | AMTECH SYSTEMS INC | ASYS | 527,666 | -11,000 | 6,237,000 | 2,800,000 | $11.82 |
| 12/31/2020 | AMTECH SYSTEMS INC | ASYS | 538,666 | -59,827 | 3,437,000 | 510,000 | $6.38 |
| 09/30/2020 | AMTECH SYSTEMS INC | ASYS | 598,493 | -25,813 | 2,927,000 | -113,000 | $4.89 |
| 06/30/2020 | AMTECH SYSTEMS INC | ASYS | 624,306 | -8,000 | 3,040,000 | 289,000 | $4.87 |
| 03/31/2020 | AMTECH SYSTEMS INC | ASYS | 632,306 | -33,535 | 2,751,000 | -2,016,000 | $4.35 |
| 02/04/2020 | AMTECH SYSTEMS INC | ASYS | 665,841 | -126,448 | 3,642,150 | -556,850 | $5.47 |
| 12/31/2019 | AMTECH SYSTEMS INC | ASYS | 665,841 | -126,448 | 4,767,000 | 568,000 | $7.16 |
| 09/30/2019 | AMTECH SYSTEMS INC | ASYS | 792,289 | -130,658 | 4,199,000 | -877,000 | $5.30 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 922,947 | -101,221 | 5,076,000 | -383,000 | $5.50 |
| 03/31/2019 | AMTECH SYSTEMS INC | ASYS | 1,024,168 | -97,300 | 5,459,000 | 379,000 | $5.33 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 1,121,468 | -22,919 | 5,080,000 | -1,031,000 | $4.53 |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 1,144,387 | 16,465 | 6,111,000 | -713,000 | $5.34 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 1,127,922 | 292,876 | 6,824,000 | 711,000 | $6.05 |
| 03/31/2018 | AMTECH SYSTEMS INC | ASYS | 835,046 | 72,616 | 6,113,000 | -1,565,000 | $7.32 |
| 01/03/2018 | AMTECH SYSTEMS INC | ASYS | 762,430 | -252,221 | 7,975,018 | -4,180,982 | $10.46 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 762,430 | -252,221 | 7,678,000 | -4,478,000 | $10.07 |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 1,014,651 | -216,351 | 12,156,000 | 1,766,000 | $11.98 |
| 06/30/2017 | AMTECH SYSTEMS INC | ASYS | 1,231,002 | -76,000 | 10,390,000 | 3,201,000 | $8.44 |
| 03/31/2017 | AMTECH SYSTEMS INC | ASYS | 1,307,002 | -36,959 | 7,189,000 | 1,477,000 | $5.50 |
| 12/31/2016 | AMTECH SYSTEMS INC | ASYS | 1,343,961 | -112,000 | 5,712,000 | -1,510,000 | $4.25 |
| 09/30/2016 | AMTECH SYSTEMS INC | ASYS | 1,455,961 | 749,261 | 7,222,000 | -1,379,000 | $4.96 |
| 06/30/2016 | AMTECH SYSTEMS INC | ASYS | 1,424,023 | 41,855 | 8,501,000 | -151,000 | $5.97 |
| 03/31/2016 | AMTECH SYSTEMS INC | ASYS | 1,431,623 | 49,455 | 9,291,000 | 639,000 | $6.49 |
| 12/31/2015 | AMTECH SYSTEMS INC | ASYS | 1,382,168 | -203,832 | 8,652,000 | 1,832,000 | $6.26 |
| 09/30/2015 | AMTECH SYSTEMS INC | ASYS | 1,586,000 | 50,668 | 6,820,000 | -9,132,000 | $4.30 |
| 06/30/2015 | AMTECH SYSTEMS INC | ASYS | 1,535,332 | 109,652 | 15,952,000 | 13,000 | $10.39 |
| 03/31/2015 | AMTECH SYSTEMS INC | ASYS | 1,425,680 | 446,356 | 15,939,000 | 5,999,000 | $11.18 |
| 12/31/2014 | AMTECH SYSTEMS INC | ASYS | 979,324 | 92,411 | 9,940,000 | 450,000 | $10.15 |
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