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Polaris Capital Management, LLC
> MKSI
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 03/31/2023 | MKS INSTRUMENTS INC | MKSI | 650,800 | 640,100 | 57,673,896,000 | 57,673,012,000 | $88,620.00 |
| 09/30/2022 | MKS INSTRUMENTS INC | MKSI | 10,700 | 2,400 | 884,000 | 32,000 | $82.62 |
| 06/30/2022 | MKS INSTRUMENTS INC | MKSI | 8,300 | 3,000 | 852,000 | 57,000 | $102.65 |
| 03/31/2022 | MKS INSTRUMENTS INC | MKSI | 5,300 | -3,200 | 795,000 | -685,000 | $150.00 |
| 12/31/2021 | MKS INSTRUMENTS INC | MKSI | 8,500 | 0 | 1,480,000 | 197,000 | $174.12 |
| 09/30/2021 | MKS INSTRUMENTS INC | MKSI | 8,500 | 0 | 1,283,000 | -200,000 | $150.94 |
| 03/31/2021 | MKS INSTRUMENTS INC | MKSI | 8,500 | -2,500 | 1,483,000 | -172,000 | $174.47 |
| 12/31/2020 | MKS INSTRUMENTS INC | MKSI | 11,000 | 0 | 1,655,000 | 453,000 | $150.45 |
| 09/30/2020 | MKS INSTRUMENTS INC | MKSI | 11,000 | -1,600 | 1,202,000 | -225,000 | $109.27 |
| 06/30/2020 | MKS INSTRUMENTS INC | MKSI | 12,600 | -3,200 | 1,427,000 | 140,000 | $113.25 |
| 03/31/2020 | MKS INSTRUMENTS INC | MKSI | 15,800 | 15,800 | 1,287,000 | 1,287,000 | $81.46 |
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