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OBERWEIS ASSET MANAGEMENT INC
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 118,900 | 0 | 1,136,684,000 | 2,378,000 | $9,560.00 |
| 03/31/2023 | AMTECH SYSTEMS INC | ASYS | 118,900 | 5,000 | 1,134,306,000 | 268,666,000 | $9,540.00 |
| 12/31/2022 | AMTECH SYSTEMS INC | ASYS | 113,900 | 0 | 865,640,000 | 864,672,000 | $7,600.00 |
| 09/30/2022 | AMTECH SYSTEMS INC | ASYS | 113,900 | 5,000 | 968,000 | 173,000 | $8.50 |
| 06/30/2022 | AMTECH SYSTEMS INC | ASYS | 108,900 | -1,800 | 795,000 | -319,000 | $7.30 |
| 03/31/2022 | AMTECH SYSTEMS INC | ASYS | 110,700 | 8,200 | 1,114,000 | 101,000 | $10.06 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 102,500 | 35,000 | 1,013,000 | 241,000 | $9.88 |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 67,500 | 67,500 | 772,000 | 772,000 | $11.44 |
| 09/30/2011 | AMTECH SYSTEMS INC | ASYS | 0 | -152,800 | 0 | -3,154,000 | |
| 06/30/2011 | AMTECH SYSTEMS INC | ASYS | 152,800 | 101,300 | 3,154,000 | 1,854,000 | $20.64 |
| 03/31/2011 | AMTECH SYSTEMS INC | ASYS | 51,500 | -95,940 | 1,300,000 | -2,408,000 | $25.24 |
| 12/31/2010 | AMTECH SYSTEMS INC | ASYS | 147,440 | -65,980 | 3,708,000 | -125,000 | $25.15 |
| 09/30/2010 | AMTECH SYSTEMS INC | ASYS | 213,420 | 3,220 | 3,833,000 | 2,719,000 | $17.96 |
| 09/30/2009 | AMTECH SYSTEMS INC | ASYS | 210,200 | -10,800 | 1,114,000 | 42,000 | $5.30 |
| 06/30/2009 | AMTECH SYSTEMS INC | ASYS | 221,000 | -53,800 | 1,072,000 | 187,000 | $4.85 |
| 03/31/2009 | AMTECH SYSTEMS INC | ASYS | 274,800 | -45,400 | 885,000 | -297,000 | $3.22 |
| 12/31/2008 | AMTECH SYSTEMS INC | ASYS | 320,200 | 320,200 | 1,182,000 | 1,182,000 | $3.69 |
| 09/30/2008 | AMTECH SYSTEMS INC | ASYS | 98,100 | 98,100 | 913,000 | 913,000 | $9.31 |
| 03/31/2002 | AMTECH SYSTEMS INC | ASYS | 0 | -20,000 | 0 | -143,000 | |
| 12/31/2001 | AMTECH SYSTEMS INC | ASYS | 20,000 | 0 | 143,000 | 44,000 | $7.15 |
| 09/30/2001 | AMTECH SYSTEMS INC | ASYS | 20,000 | 0 | 99,000 | -92,000 | $4.95 |
| 06/30/2001 | AMTECH SYSTEMS INC | ASYS | 20,000 | 20,000 | 191,000 | 191,000 | $9.55 |
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