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TimesSquare Capital Management, LLC
> NANO
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | ONTO INNOVATION INC. | NANO | 281,111 | -187,585 | 32,741,000 | -8,448,000 | $116.47 |
| 03/31/2023 | ONTO INNOVATION INC. | NANO | 468,696 | -155,039 | 41,189,000 | 1,239,000 | $87.88 |
| 09/30/2022 | ONTO INNOVATION INC. | NANO | 623,735 | -62,415 | 39,950,000 | -7,902,000 | $64.05 |
| 06/30/2022 | ONTO INNOVATION INC. | NANO | 686,150 | 13,715 | 47,852,000 | -10,576,000 | $69.74 |
| 03/31/2022 | ONTO INNOVATION INC. | NANO | 672,435 | -35,055 | 58,428,000 | -13,191,000 | $86.89 |
| 12/31/2021 | ONTO INNOVATION INC. | NANO | 707,490 | -26,110 | 71,619,000 | 18,616,000 | $101.23 |
| 09/30/2021 | ONTO INNOVATION INC. | NANO | 733,600 | -354,246 | 53,003,000 | -18,479,000 | $72.25 |
| 03/31/2021 | ONTO INNOVATION INC. | NANO | 1,087,846 | -163,550 | 71,482,000 | 11,978,000 | $65.71 |
| 12/31/2020 | ONTO INNOVATION INC. | NANO | 1,251,396 | 22,824 | 59,504,000 | 22,917,000 | $47.55 |
| 09/30/2020 | ONTO INNOVATION INC. | NANO | 1,228,572 | 129,747 | 36,587,000 | -817,000 | $29.78 |
| 06/30/2020 | ONTO INNOVATION INC. | NANO | 1,098,825 | 257,670 | 37,404,000 | 12,447,000 | $34.04 |
| 03/31/2020 | ONTO INNOVATION INC. | NANO | 841,155 | 841,155 | 24,957,000 | 24,957,000 | $29.67 |
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