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STATE STREET CORP
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 39,590 | 2,600 | 378,480,000 | 97,356,000 | $9,559.99 |
| 12/31/2022 | AMTECH SYSTEMS INC | ASYS | 36,990 | -400 | 281,124,000 | 280,806,000 | $7,600.00 |
| 09/30/2022 | AMTECH SYSTEMS INC | ASYS | 37,390 | 0 | 318,000 | 45,000 | $8.50 |
| 06/30/2022 | AMTECH SYSTEMS INC | ASYS | 37,390 | 0 | 273,000 | -103,000 | $7.30 |
| 03/31/2022 | AMTECH SYSTEMS INC | ASYS | 37,390 | 2,560 | 376,000 | 32,000 | $10.06 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 34,830 | 0 | 344,000 | -54,000 | $9.88 |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 34,830 | 11,400 | 398,000 | 172,000 | $11.43 |
| 06/30/2021 | AMTECH SYSTEMS INC | ASYS | 23,430 | 23,430 | 226,000 | 226,000 | $9.65 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 0 | -12,598 | 0 | -67,000 | |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 12,598 | 873 | 67,000 | -3,000 | $5.32 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 11,725 | 11,725 | 70,000 | 70,000 | $5.97 |
| 06/30/2012 | AMTECH SYSTEMS INC | ASYS | 0 | -146,379 | 0 | -1,216,000 | |
| 03/31/2012 | AMTECH SYSTEMS INC | ASYS | 146,379 | 8,171 | 1,216,000 | 113,000 | $8.31 |
| 12/31/2011 | AMTECH SYSTEMS INC | ASYS | 147,374 | 9,166 | 1,255,000 | 152,000 | $8.52 |
| 09/30/2011 | AMTECH SYSTEMS INC | ASYS | 138,208 | 16,400 | 1,103,000 | -1,412,000 | $7.98 |
| 06/30/2011 | AMTECH SYSTEMS INC | ASYS | 121,808 | 121,808 | 2,515,000 | 2,515,000 | $20.65 |
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