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KOKINO LLC
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| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 09/30/2022 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 19,125,000 | 2,700,000 | $8.50 |
| 06/30/2022 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 16,425,000 | -6,210,000 | $7.30 |
| 03/31/2022 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 22,635,000 | 405,000 | $10.06 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 22,230,000 | 10,305,000 | $9.88 |
| 09/30/2019 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 11,925,000 | -450,000 | $5.30 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 12,375,000 | 382,000 | $5.50 |
| 03/31/2019 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 11,993,000 | 1,800,000 | $5.33 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 10,193,000 | -1,822,000 | $4.53 |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 12,015,000 | -1,597,000 | $5.34 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 13,612,000 | -2,858,000 | $6.05 |
| 03/31/2018 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 16,470,000 | -6,187,000 | $7.32 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 22,657,000 | -4,298,000 | $10.07 |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 26,955,000 | 7,965,000 | $11.98 |
| 06/30/2017 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 18,990,000 | 9,427,000 | $8.44 |
| 12/31/2016 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 9,563,000 | -1,597,000 | $4.25 |
| 09/30/2016 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 0 | 11,160,000 | -2,272,000 | $4.96 |
| 06/30/2016 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 2,250,000 | 13,432,000 | 13,432,000 | $5.97 |
| 03/31/2016 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 460,000 | 14,602,000 | 6,905,000 | $6.49 |
| 12/31/2015 | AMTECH SYSTEMS INC | ASYS | 2,250,000 | 460,000 | 14,085,000 | 6,388,000 | $6.26 |
| 09/30/2015 | AMTECH SYSTEMS INC | ASYS | 1,790,000 | 1,790,000 | 7,697,000 | 7,697,000 | $4.30 |
| 06/30/2015 | AMTECH SYSTEMS INC | ASYS | 1,775,000 | 1,775,000 | 18,443,000 | 18,443,000 | $10.39 |
| 03/31/2015 | AMTECH SYSTEMS INC | ASYS | 1,550,000 | 1,550,000 | 17,329,000 | 17,329,000 | $11.18 |
| 12/31/2014 | AMTECH SYSTEMS INC | ASYS | 1,100,000 | 1,100,000 | 11,220,000 | 11,220,000 | $10.20 |
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