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Walthausen & Co., LLC
> ACLS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 09/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 37,174 | 0 | 2,039,000 | 0 | $54.85 |
| 06/30/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 37,174 | 3,130 | 2,039,000 | -532,000 | $54.85 |
| 03/31/2022 | AXCELIS TECHNOLOGIES INC | ACLS | 34,044 | -970 | 2,571,000 | -40,000 | $75.52 |
| 12/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 35,014 | -17,600 | 2,611,000 | 137,000 | $74.57 |
| 09/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 52,614 | -11,466 | 2,474,000 | -116,000 | $47.02 |
| 06/30/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 68,130 | 0 | 2,799,000 | 0 | $41.08 |
| 03/31/2021 | AXCELIS TECHNOLOGIES INC | ACLS | 68,130 | -1,670 | 2,799,000 | 766,000 | $41.08 |
| 12/31/2020 | AXCELIS TECHNOLOGIES INC | ACLS | 69,800 | 69,800 | 2,033,000 | 2,033,000 | $29.13 |
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