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IRONWOOD INVESTMENT MANAGEMENT LLC
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 29,511 | -907 | 282,125,000 | -8,063,000 | $9,559.99 |
| 03/31/2023 | AMTECH SYSTEMS INC | ASYS | 30,418 | 1,531 | 290,188,000 | 70,647,000 | $9,540.01 |
| 12/31/2022 | AMTECH SYSTEMS INC | ASYS | 28,887 | -2,496 | 219,541,000 | 219,274,000 | $7,599.99 |
| 09/30/2022 | AMTECH SYSTEMS INC | ASYS | 31,383 | 87 | 267,000 | 39,000 | $8.51 |
| 06/30/2022 | AMTECH SYSTEMS INC | ASYS | 31,296 | 18 | 228,000 | -87,000 | $7.29 |
| 03/31/2022 | AMTECH SYSTEMS INC | ASYS | 31,278 | 555 | 315,000 | 11,000 | $10.07 |
| 12/31/2021 | AMTECH SYSTEMS INC | ASYS | 30,723 | 568 | 304,000 | -41,000 | $9.89 |
| 09/30/2021 | AMTECH SYSTEMS INC | ASYS | 30,155 | 28 | 345,000 | 55,000 | $11.44 |
| 06/30/2021 | AMTECH SYSTEMS INC | ASYS | 30,127 | -722 | 290,000 | -75,000 | $9.63 |
| 03/31/2021 | AMTECH SYSTEMS INC | ASYS | 30,849 | 244 | 365,000 | 170,000 | $11.83 |
| 12/31/2020 | AMTECH SYSTEMS INC | ASYS | 30,605 | -870 | 195,000 | 41,000 | $6.37 |
| 09/30/2020 | AMTECH SYSTEMS INC | ASYS | 31,475 | -62 | 154,000 | 0 | $4.89 |
| 06/30/2020 | AMTECH SYSTEMS INC | ASYS | 31,537 | -172 | 154,000 | 16,000 | $4.88 |
| 03/31/2020 | AMTECH SYSTEMS INC | ASYS | 31,709 | 1,585 | 138,000 | -78,000 | $4.35 |
| 12/31/2019 | AMTECH SYSTEMS INC | ASYS | 30,124 | -5,334 | 216,000 | 28,000 | $7.17 |
| 09/30/2019 | AMTECH SYSTEMS INC | ASYS | 35,458 | -137 | 188,000 | -8,000 | $5.30 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 35,595 | -20 | 196,000 | 6,000 | $5.51 |
| 03/31/2019 | AMTECH SYSTEMS INC | ASYS | 35,615 | -406 | 190,000 | 27,000 | $5.33 |
| 12/31/2018 | AMTECH SYSTEMS INC | ASYS | 36,021 | -1,000 | 163,000 | -35,000 | $4.53 |
| 09/30/2018 | AMTECH SYSTEMS INC | ASYS | 37,021 | -3 | 198,000 | -26,000 | $5.35 |
| 06/30/2018 | AMTECH SYSTEMS INC | ASYS | 37,024 | -165 | 224,000 | -48,000 | $6.05 |
| 03/31/2018 | AMTECH SYSTEMS INC | ASYS | 37,189 | 29 | 272,000 | -102,000 | $7.31 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 37,160 | -473 | 374,000 | -77,000 | $10.06 |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 37,633 | 37 | 451,000 | 134,000 | $11.98 |
| 06/30/2017 | AMTECH SYSTEMS INC | ASYS | 37,596 | -2,382 | 317,000 | 97,000 | $8.43 |
| 03/31/2017 | AMTECH SYSTEMS INC | ASYS | 39,978 | 2,398 | 220,000 | 60,000 | $5.50 |
| 12/31/2016 | AMTECH SYSTEMS INC | ASYS | 37,580 | -9,255 | 160,000 | -72,000 | $4.26 |
| 09/30/2016 | AMTECH SYSTEMS INC | ASYS | 46,835 | -10,447 | 232,000 | -110,000 | $4.95 |
| 06/30/2016 | AMTECH SYSTEMS INC | ASYS | 57,282 | -23,283 | 342,000 | -181,000 | $5.97 |
| 03/31/2016 | AMTECH SYSTEMS INC | ASYS | 80,565 | 80,565 | 523,000 | 523,000 | $6.49 |
| 12/31/2015 | AMTECH SYSTEMS INC | ASYS | 175,624 | 175,624 | 1,099,000 | 1,099,000 | $6.26 |
| 09/30/2015 | AMTECH SYSTEMS INC | ASYS | 217,861 | 217,861 | 937,000 | 937,000 | $4.30 |
| 06/30/2015 | AMTECH SYSTEMS INC | ASYS | 333,263 | 333,263 | 3,463,000 | 3,463,000 | $10.39 |
| 03/31/2015 | AMTECH SYSTEMS INC | ASYS | 120,029 | 120,029 | 1,342,000 | 1,342,000 | $11.18 |
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