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KENNEDY CAPITAL MANAGEMENT, INC.
> ASYS
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | AMTECH SYSTEMS INC | ASYS | 215,410 | 215,410 | 2,059,320,000 | 2,059,320,000 | $9,560.00 |
| 09/30/2020 | AMTECH SYSTEMS INC | ASYS | 0 | -54,615 | 0 | -266,000 | |
| 06/30/2020 | AMTECH SYSTEMS INC | ASYS | 54,615 | -33,616 | 266,000 | -118,000 | $4.87 |
| 03/31/2020 | AMTECH SYSTEMS INC | ASYS | 88,231 | -13,768 | 384,000 | -346,000 | $4.35 |
| 12/31/2019 | AMTECH SYSTEMS INC | ASYS | 101,999 | -2,457 | 730,000 | 176,000 | $7.16 |
| 09/30/2019 | AMTECH SYSTEMS INC | ASYS | 104,456 | 5,350 | 554,000 | 9,000 | $5.30 |
| 06/30/2019 | AMTECH SYSTEMS INC | ASYS | 99,106 | 99,106 | 545,000 | 545,000 | $5.50 |
| 12/31/2017 | AMTECH SYSTEMS INC | ASYS | 0 | -147,254 | 0 | -1,764,000 | |
| 09/30/2017 | AMTECH SYSTEMS INC | ASYS | 147,254 | 147,254 | 1,764,000 | 1,764,000 | $11.98 |
| 09/30/2011 | AMTECH SYSTEMS INC | ASYS | 0 | -33,300 | 0 | -401,000 | |
| 09/30/2008 | AMTECH SYSTEMS INC | ASYS | 43,800 | 43,800 | 408,000 | 408,000 | $9.32 |
| 06/30/2008 | AMTECH SYSTEMS INC | ASYS | 42,300 | 42,300 | 454,000 | 454,000 | $10.73 |
| 03/31/2008 | AMTECH SYSTEMS INC | ASYS | 33,300 | 33,300 | 401,000 | 401,000 | $12.04 |
| 12/31/2007 | AMTECH SYSTEMS INC | ASYS | 46,600 | 46,600 | 605,000 | 605,000 | $12.98 |
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